High Current Implanters
AMAT E500
› Original Equipment Manufacturer? (Yes/No, if no please state the details ) Yes› Exact Model Type? (Yes/No, if no please state the details ) E500 EHP› OEM Serial ID?ES193741 U2› Completeness: Total/partial/Donor tool? Please list missing parts.Total› Date of first usage?NA› Technic special customized for Infineon?NA› Correct maintained?Yes› Any damages/deficits known?No› Manuals existing?No› Crated: If yes…/ professional with protocol / partly / simple?No› Detailed Configuration/Specification of the tool › Any upgrades / extensions?Thin Wafer handling kit, Hydrogen implant, LX upgrade, Windown 7 OS› Useable for which products?8" Thin Taiko wafers› Wafer size (if applicable)?200mm› Any consumables at end of lifetime?Yes (source, electrode)› Procured from OEM or from second hand?From IR Singapore› Any refurbishments done?No› Any doubts that the tool is failure free useable for the next three years?Yes› Was there a significant system failure in the last three years?No› Any contaminations known?BF3, H2› IFX inventory200016809location INFINEON KULIM FAB 2 LEVEL 3 PRODUCTION AREA CLEANROOM