Wafer Fabrication

  2. 3 DXZ/CXZ Chambers for Centura/P5000

    Cluster PECVD Tools

    3 DXZ/CXZ Chambers for Centura/P5000

    3 DXZ/CXZ Chambers for Centura/P5000Mainframe is transport rack 

  4. EPI 39 - AMAT EPI CENTURA

    Epitaxial Cluster Tools

    EPI 39 - AMAT EPI CENTURA

    Software Ver: B6.50

    CB1 Amps: 300A

    Vita Controller

    Flow Point Model: Nano Valve

    Gas Panel Type: Configurable

    Wafer Size: 200mm (with conversion kit 150mm is possible)

    M-Monitor: CRT

    3 Chambers ATM EPI

    With digital Flow-Control of the cooling systems with interlock and passphrase (Simens PLC)

     Standard pneumatic waferlift

    Center Finding System: OTF

    Buffer robot: HP+

    Piezocon sensor: No

    VSB: Yes

    Wide Body LL

    Tool called "EPI39"

  5. Implanter Varian Viision 200+

    High Current Implanters

    Implanter Varian Viision 200+

    200 mm Implanter in very good condition

    Price net 982k$  based on Incoterm FCA, as is without warranty

  7. Nexx Apollo PVD

    Horizontal Sputterers

    Nexx Apollo PVD

    The Nexx Apollo PVD system is a fully automated Physical Vapor Deposition (PVD) tool using a multiple wafer multiple chamber design. The system deposits thin metal films used in interconnect metallization on wafers. It uses a staged vacuum system that allow short pump down time to achieve ultra high vacuum. The multi chamber design allows for precise control over all process parameters.

  9. TEL ACT8-D -Track

    Other Lithography Equipment

    TEL ACT8-D -Track

    AC Power Box, T/C Unit, T/H Controller 1+2, Chemical Cabinet

    Last Time in production: 5/5/25

    Contact: Agthen Robert (FE DRS P M2 MNT LIT)

  11. AMAT E500

    High Current Implanters

    AMAT E500

    › Original Equipment Manufacturer? (Yes/No, if no please state the details ) Yes› Exact Model Type? (Yes/No, if no please state the details ) E500 EHP› OEM Serial ID?ES193741 U2› Completeness: Total/partial/Donor tool? Please list missing parts.Total› Date of first usage?NA› Technic special customized for Infineon?NA› Correct maintained?Yes› Any damages/deficits known?No› Manuals existing?No› Crated: If yes…/ professional with protocol / partly / simple?No› Detailed Configuration/Specification of the tool › Any upgrades / extensions?Thin Wafer handling kit, Hydrogen implant, LX upgrade, Windown 7 OS› Useable for which products?8"  Thin Taiko wafers› Wafer size (if applicable)?200mm› Any consumables at end of lifetime?Yes (source, electrode)› Procured from OEM or from second hand?From IR Singapore› Any refurbishments done?No› Any doubts that the tool is failure free useable for the next three years?Yes› Was there a significant system failure in the last three years?No› Any contaminations known?BF3, H2› IFX inventory200016809location INFINEON KULIM FAB 2 LEVEL 3 PRODUCTION AREA CLEANROOM

    Make: AMAT

    Model: Back end Implanter Amat E500

    1 unit @ Best Price

    Kulim, Malaysia

    Item 259241