Lithography Equipment

  1. ASML-AT1250 DUV193nm

    Other Lithography Equipment

    ASML-AT1250 DUV193nm

    Equipment according the age in good in good shape,

    however only one wafer stage is currently working 

    2003: "ASML's new generation TWINSCAN system patterns for 65 nm node"

    Equipment inspection virtual or physical possible

  2. CANON 5500iZ - Stepper

    Other Lithography Equipment

    CANON 5500iZ - Stepper

    '- 12" Standard Wafer Chuck and 12" wafer handling system - SMIF type reticle loading ports and reticle changer unit- Pellicle Particle checker installed

    - Hg-lamp will be rmoved prior shipping- Coolant will be removed prior shipping- all batteries will be removed prior shipping