ACT DB System, AC Power Box, T/C Unit 1+2, T/H Controller ESA 1+2, Chemical Cabinet 1, 2, 3

AC Power Box, T/C Unit, T/H Controller 1+2, Chemical Cabinet

Last Time in production: 5/5/25

Contact: Agthen Robert (FE DRS P M2 MNT LIT)

Equipment according the age in good in good shape,

however only one wafer stage is currently working 

2003: "ASML's new generation TWINSCAN system patterns for 65 nm node"

Equipment inspection virtual or physical possible

two process blocks ACT 12 PIQ with 16 HCH Plates, 4 PCT´s 2 DEV Units, 1 WEE

last time in production: 07.08.2024

'- 12" Standard Wafer Chuck and 12" wafer handling system - SMIF type reticle loading ports and reticle changer unit- Pellicle Particle checker installed

- Hg-lamp will be rmoved prior shipping- Coolant will be removed prior shipping- all batteries will be removed prior shipping