Silicon Preparation

  1. CAI519 Canon FPA 3000 i5+

    Other Wafer Production Equipment

    CAI519 Canon FPA 3000 i5+

    Canon FPA 3000 i5+

    General Configuration:

    • FPA 3000 - i5(+)
    • Manufactured in  June / 1997
      • 8“ Wafer Chuck, Notch PA unit
      • 6“ Nikon-type Reticle Changer
      • Reticle Barcode-Reader =   yes
      • Cassette Barcode Reader = yes
      • Pellicle Particle Checker =   yes
      • Online - ESPA =   yes
      • Interface type:   right
      • Standard flys eye lens
      • Chamber type: CD80
  2. Ramgraber SST

    Solvent Wet Stations

    Ramgraber SST

    Used Configuration:

    Tank 1: EKC

    Tank 2: P1331

    Tank 3 and 4: DMF

    Tank 5: IPA

    Known errors:

    Filter from tank 4 is leaking

    Heater 1 from tank 4 is broken

    Heater 3 from tank 4 is broken