Automated Coating and Developing Cluster System
TEL - ACT8 - Coater / Developer
no missing parts
T/H controller 1 to 3 need service/repair
last time in production 10.1.2024
ACT8 DB System, 2 BCT, 2 COT, 3 DEV, 3 CHP, 1WEE, 10LHP, 2 ADH, 4 HHP, CWD,
Photoresist Tools
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Automated Coating and Developing Cluster System
TEL - ACT8-D
no missing parts, no damages - well maintained
last time in Production 14.5.2024
ACT8 DB System, 2BCT, 2 COT, 4 DEV, 5PHP, 9 LHP, 4HHP, 2 ADH, 1WEE
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