Other Wafer Production Equipment
Canon FPA 3000 i5+
General Configuration:
Other Wafer Production Equipment
It´s a Trikon Sigma FxP200 with 4 Std RevA DEP Chambers, 1 RevA HSE (not complete),
1 MKII Heat Chamber. Brooks MX800 Platform with 2 Swing Out VCE6 Loadlocks. The
Platform is upgradet from T5 Controller (MX800) to GTM with PC104 Controller. All DEP Chambers HSE and Transport has CTI Onboard 8F Cryos and 2 9600 Cryo Compressor. No Forline Pumps
Other Wafer Production Equipment
TEL ACT12 - Double Block - 300mm + LITVC1-02
Other Wafer Production Equipment
The IVS120 is an automatic metrology system designed for measuring critical dimensions (CD´s).
Other Wafer Production Equipment
Other Wafer Production Equipment
- Tool is not fully functional and not in the original condition
- Tool can be used as donor tool only
- No pictures available but tool inspection is possible
Other Wafer Production Equipment
Other Wafer Production Equipment
Other Wafer Production Equipment
Die Anlage war bis zur Deinstallation im Dezember in Produktion.
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