Canon FPA 3000 i5+

General Configuration:

• FPA 3000 - i5(+)
• Manufactured in  June / 1997
  • 8“ Wafer Chuck, Notch PA unit
  • 6“ Nikon-type Reticle Changer
  • Reticle Barcode-Reader =   yes
  • Cassette Barcode Reader = yes
  • Pellicle Particle Checker =   yes
  • Online - ESPA =   yes
  • Interface type:   right
  • Standard flys eye lens
  • Chamber type: CD80

300mm + LITVC1-02

Sale without Clean track Act12 possible. Can be seperated.

THWV12-01 - PFM9_n8_12_DR-3000 III Tape Laminator

- Tool is not fully functional and not in the original condition

- Tool can be used as donor tool only

- No pictures available but tool inspection is possible

IFX Tool Code: MS11 

AMAT/Varian E500HP (Midcurrentimplant) 

 Available: March, 2026 

Die Anlage war bis zur Deinstallation im Dezember in Produktion.

Taper Nitto-DR - 8500

Detaper HR8500-2