Manufacturer: Applied Materials

  1. AMAT HDP Centura (#615)

    Cluster PECVD Tools

    AMAT HDP Centura (#615)

    Software: Win 10

    OR 4000 WTM Controller

    3x ENI Generator Racks

    Chiller INR-498-011D

    2x Remote Monitor

    High Density Plasma Process; Process Chambers: A,B,C; Orienter chamber F

    Software: Win 10

    OR 4000 WTM Controller

    3x ENI Generator Racks, Chiller INR-498-011D

    2x Remote Monitor

    High Density Plasma Process

    Process Chambers: A,B,C

    Orienter chamber F

    System: 1x Mainframe

    3x process chamber

    1x Controller Rack

    1x Chiller

    3x ENI Generator Racks (Converted to separate water supply each Generator)

    1x Controller Rack

    x Chiller

    3x ENI Generator Racks (Converted to separate water supply each Generator)

    AMAT Vita/Delphin Controller

    Tool will be sold without Software

  2. AMAT P5000 XT (Poly - Trench)

    Cluster Plasma Tools - Poly/Nitride

    AMAT P5000 XT (Poly - Trench)

    The tool offered is already in storage. The three images are from an identical system that is still in operation. The tool in storage was dismantled correctly and is stored optimally.The tool offered is already in storage. The three images are from an identical system that is still in operation. The tool in storage was dismantled correctly and is stored optimally.

    Tool facts:

    Applied Material P5000XT

    -top mount elektronics and He backing

    -2 Chamber Narrow Gap tool

    -installed pos. Chamber A/B

    -Standard Phase 3 Robot

    -15 slot storage elevator

    -ZA Slit Valves pos. A/B

    -Wafer Positioning Sensor (WPS)

    -Cassette loadport with 2 stages

    -2 Monitor

    -System SSD

    -CF card Floppy emulator

    -MXP Unibody chamber with Narrow Gap lid

    -Turbo Seiki STP-301CVB

    -Controller Seiki SCU-350D

    -MKS Manometer

    -7 Gas Sticks / Brooks GF 100 MFCs

    -Gas: Hbr, NF3, NF3-2, N2, He/O2, Ar, CF4

    -2x AMAT 1 heat exchanger / Stainless Steel hoses (50ft)

    -2x ENI OEM 12B RF generators

    -AC Box at RF Rack

  7. P5000 34

    Other Wafer Production Equipment

    P5000 34

    Toolcode sending siteP500034IFX ET ID:255050AreaPETEqToolcode sending siteP500034IFX ET ID:255050AreaPETEqu. Grp Code78222Workcenter (Equ. Grp. Name)P_AN_POL_P5000_K_6Completeness fully/some parts missing/ many parts missingYes, fully completeVendorAMATTooltype P5000-MXPu. Grp Code78222Workcenter (Equ. Grp. Name)P_AN_POL_P5000_K_6Completeness fully/some parts missing/ many parts missingYes, fully completeVendorAMATTooltype P5000-MXP
  8. P5000 21

    Other Wafer Production Equipment

    P5000 21

    AreaDEPEqu. Grp Code79402Workcenter (Equ. Grp. Name)A_CV_SNIT_P5000_K_RS_6Completeness fully/some parts missing/ many parts missingYes, fully completeVendorAMATTooltype P5000Qty.  of Chambers4Spares to sellNoWafer Diameter6Date of availability available immdiatelyStatusDe-installed
  9. P5000 20

    Other Wafer Production Equipment

    P5000 20

    AreaDEPEqu. Grp Code73401Workcenter (Equ. Grp. Name)A_CV_SNIT_P5000_K_6Completeness fully/some parts missing/ many parts missingYes, fully completeVendorAMATTooltype P5000Qty.  of Chambers4Spares to sellNoWafer Diameter6Date of availability available immdiatelyStatusDe-installedStorage locationWarehose
  10. P5000 17

    Other Wafer Production Equipment

    P5000 17

    AreaCVDEqu. Grp Code83404Workcenter (Equ. Grp. Name)A_CV_SNIT_P5000_RS_8Completeness fully/some parts missing/ many parts missingYes, fully completeVendorAMATTooltype P5000Qty.  of Chambers4Spares to sellNoWafer Diameter8Date of availability available immdiatelyStatusDe-installed
  11. P5000 9

    Other Wafer Production Equipment

    P5000 9

    AreaCVDEqu. Grp Code79404Workcenter (Equ. Grp. Name)A_CV_SNIT_P5000_K_RS_GAN_6Completeness fully/some parts missing/ many parts missingYes, fully completeVendorAMATTooltype P5000Qty.  of Chambers2 + 2Spares to sellNoCommentsGora 2Surplus Nr255046Wafer Diameter8Date of availability available immdiatelyStatusDe-installed